发明授权
- 专利标题: Magnetic force microscope and magnetic field observation method using same
- 专利标题(中): 磁力显微镜和磁场观察法使用相同
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申请号: US13479860申请日: 2012-05-24
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公开(公告)号: US08912789B2公开(公告)日: 2014-12-16
- 发明人: Seiji Heike
- 申请人: Seiji Heike
- 申请人地址: JP Tokyo
- 专利权人: Hitachi, Ltd.
- 当前专利权人: Hitachi, Ltd.
- 当前专利权人地址: JP Tokyo
- 代理机构: Mattingly & Malur, PC
- 优先权: JP2011-134563 20110616
- 主分类号: G01B7/14
- IPC分类号: G01B7/14 ; G01Q60/56 ; G01R33/038 ; B82Y35/00
摘要:
A magnetic force microscope capable of measuring the absolute value of a magnetic field with high resolution without causing a change in magnetization state of the probe. The magnetic force microscope includes a cantilever, a probe, a displacement detector that detects a displacement of the probe, a specimen carrier, and various transfer units. The magnetic force microscope that measures an undulation distribution as well as a magnetic field distribution on the surface of a specimen placed on the specimen carrier is further provided with a magnetic-field impress-unit that impresses a magnetic field to the probe, and an output of the magnetic-field impress-unit is controlled such that a magnetic force impressed onto the probe 5 is turned zero to thereby measure a magnetic field distribution on the surface of the specimen.
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