发明授权
US08912789B2 Magnetic force microscope and magnetic field observation method using same 有权
磁力显微镜和磁场观察法使用相同

  • 专利标题: Magnetic force microscope and magnetic field observation method using same
  • 专利标题(中): 磁力显微镜和磁场观察法使用相同
  • 申请号: US13479860
    申请日: 2012-05-24
  • 公开(公告)号: US08912789B2
    公开(公告)日: 2014-12-16
  • 发明人: Seiji Heike
  • 申请人: Seiji Heike
  • 申请人地址: JP Tokyo
  • 专利权人: Hitachi, Ltd.
  • 当前专利权人: Hitachi, Ltd.
  • 当前专利权人地址: JP Tokyo
  • 代理机构: Mattingly & Malur, PC
  • 优先权: JP2011-134563 20110616
  • 主分类号: G01B7/14
  • IPC分类号: G01B7/14 G01Q60/56 G01R33/038 B82Y35/00
Magnetic force microscope and magnetic field observation method using same
摘要:
A magnetic force microscope capable of measuring the absolute value of a magnetic field with high resolution without causing a change in magnetization state of the probe. The magnetic force microscope includes a cantilever, a probe, a displacement detector that detects a displacement of the probe, a specimen carrier, and various transfer units. The magnetic force microscope that measures an undulation distribution as well as a magnetic field distribution on the surface of a specimen placed on the specimen carrier is further provided with a magnetic-field impress-unit that impresses a magnetic field to the probe, and an output of the magnetic-field impress-unit is controlled such that a magnetic force impressed onto the probe 5 is turned zero to thereby measure a magnetic field distribution on the surface of the specimen.
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