发明授权
- 专利标题： Chucking system with recessed support feature
- 专利标题（中）： 带凹槽支撑功能的卡盘系统
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申请号： US12828498申请日： 2010-07-01
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公开(公告)号： US08913230B2公开(公告)日： 2014-12-16
- 发明人: Mahadevan GanapathiSubramanian , Mario Johannes Meissl , Avinash Panga , Byung-Jin Choi
- 申请人： Mahadevan GanapathiSubramanian , Mario Johannes Meissl , Avinash Panga , Byung-Jin Choi
- 申请人地址： US TX Austin US TX Austin
- 专利权人： Canon Nanotechnologies, Inc.,Molecular Imprints, Inc.
- 当前专利权人： Canon Nanotechnologies, Inc.,Molecular Imprints, Inc.
- 当前专利权人地址： US TX Austin US TX Austin
- 代理商 Cameron A. King
- 主分类号： G03F7/00
- IPC分类号： G03F7/00 ; B82Y10/00 ; B82Y40/00
摘要：
In an imprint lithography system, a recessed support on a template chuck may alter a shape of a template positioned thereon providing minimization and/or elimination of premature downward deflection of outer edges of the template in a nano imprint lithography process.
公开/授权文献
- US20110001954A1 CHUCKING SYSTEM WITH RECESSED SUPPORT FEATURE 公开/授权日：2011-01-06