发明授权
- 专利标题: Grazing incidence interferometer
- 专利标题(中): 掠入射干涉仪
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申请号: US13525748申请日: 2012-06-18
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公开(公告)号: US08913250B2公开(公告)日: 2014-12-16
- 发明人: Reiya Ootao , Yutaka Kuriyama
- 申请人: Reiya Ootao , Yutaka Kuriyama
- 申请人地址: JP Kawasaki
- 专利权人: Mitutoyo Corporation
- 当前专利权人: Mitutoyo Corporation
- 当前专利权人地址: JP Kawasaki
- 代理机构: Oliff PLC
- 优先权: JP2011-140822 20110624
- 主分类号: G01B11/02
- IPC分类号: G01B11/02 ; G01B9/02 ; G01B11/24
摘要:
A grazing incidence interferometer includes a light source, a light beam divider configured to divide original light coming from the light source, an illuminator configured to apply measurement light to a measurement subject, a light beam combining module configured to combine the measurement light reflected from the measurement subject with reference light, and a photodetector configure to detect a combined light beam. The grazing incidence interferometer includes an interferometer main body, a stage configured to hold the measurement subject, a moving mechanism capable of moving the interferometer main body along the measurement subject, and an auxiliary reflector disposed on an extension of an axis of movement of the interferometer main body, an auxiliary light beam separator configured to separate auxiliary light from the original light and to apply the auxiliary light to the auxiliary reflector, and an auxiliary photodetector configured to detect the auxiliary light reflected by the auxiliary reflector.
公开/授权文献
- US20120327425A1 GRAZING INCIDENCE INTERFEROMETER 公开/授权日:2012-12-27