发明授权
- 专利标题: Fine pitch grid polarizer
- 专利标题(中): 细间距栅极偏振器
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申请号: US13628909申请日: 2012-09-27
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公开(公告)号: US08913321B2公开(公告)日: 2014-12-16
- 发明人: Mark Alan Davis
- 申请人: Moxtek, Inc.
- 申请人地址: US UT Orem
- 专利权人: Moxtek, Inc.
- 当前专利权人: Moxtek, Inc.
- 当前专利权人地址: US UT Orem
- 代理机构: Thorpe North & Western LLP
- 主分类号: G02B5/30
- IPC分类号: G02B5/30 ; B82Y20/00
摘要:
A grid polarizer including an array of groups of parallel elongated ribs disposed over a substrate. Each group of elongated ribs can comprise at least four ribs. Tops of two center ribs, at a center of each group, can be substantially the same elevational height and can be higher by more than 10 nm than tops of outer ribs of the groups. A region between adjacent ribs can have an index of refraction substantially equal to one. Some or all of the ribs can comprise polarizing wires disposed over substrate rods.
公开/授权文献
- US20130258471A1 FINE PITCH GRID POLARIZER 公开/授权日:2013-10-03