发明授权
US08916330B2 Chemically amplified photoresist composition and method for forming resist pattern
有权
化学扩增的光致抗蚀剂组合物和形成抗蚀剂图案的方法
- 专利标题: Chemically amplified photoresist composition and method for forming resist pattern
- 专利标题(中): 化学扩增的光致抗蚀剂组合物和形成抗蚀剂图案的方法
-
申请号: US12821850申请日: 2010-06-23
-
公开(公告)号: US08916330B2公开(公告)日: 2014-12-23
- 发明人: Koji Ichikawa , Takashi Hiraoka
- 申请人: Koji Ichikawa , Takashi Hiraoka
- 申请人地址: JP Tokyo
- 专利权人: Sumitomo Chemical Company, Limited
- 当前专利权人: Sumitomo Chemical Company, Limited
- 当前专利权人地址: JP Tokyo
- 代理机构: Birch, Stewart, Kolasch & Birch, LLP
- 优先权: JP2009-150360 20090624
- 主分类号: G03F7/004
- IPC分类号: G03F7/004 ; G03F7/40 ; C07C321/00 ; C07D407/00
摘要:
The present invention provides a resist composition giving a resist pattern excellent in CD uniformity and focus margin. A chemically amplified photoresist composition comprises a resin (A) and an acid generator (B), and the resin (A) contains, as a part or an entirety thereof, a copolymer (A1) which is obtained by polymerizing at least: a (meth)acrylic monomer (a1) having C5-20 alicyclic hydrocarbon group which becomes soluble in an aqueous alkali solution by the action of an acid; a (meth)acrylic monomer (a2) having a hydroxy group-containing adamantyl group; and a (meth)acrylic monomer (a3) having a lactone ring, and the copolymer (A1) has a weight-average molecular weight of 2500 or more and 5000 or less, and a content of the copolymer (A1) is not less than 50 parts by mass with respect to 100 parts by mass of the resin (A).
公开/授权文献
信息查询
IPC分类: