Invention Grant
US08918745B2 Stitch insertion for reducing color density differences in double patterning technology (DPT)
有权
缝合插入以减少双重图案化技术(DPT)中的色彩密度差异
- Patent Title: Stitch insertion for reducing color density differences in double patterning technology (DPT)
- Patent Title (中): 缝合插入以减少双重图案化技术(DPT)中的色彩密度差异
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Application No.: US13803048Application Date: 2013-03-14
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Publication No.: US08918745B2Publication Date: 2014-12-23
- Inventor: Lynn Wang , Sriram Madhavan , Luigi Capodieci
- Applicant: Lynn Wang , Sriram Madhavan , Luigi Capodieci
- Applicant Address: KY Grand Cayman
- Assignee: GlobalFoundries Inc.
- Current Assignee: GlobalFoundries Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Ditthavong & Steiner, P.C.
- Main IPC: G06F17/50
- IPC: G06F17/50

Abstract:
Methodology enabling a reduction in a density difference between two complementary exposure masks and/or windows of a layout and an apparatus for performing the method are disclosed. Embodiments include: determining a layer of an IC design having features to be resolved by first and second masks; determining a difference of density by comparing a first density of a first set of the features with a second density of a second set of the features; determining a region on the layer of a first feature to be resolved by the first mask; and inserting, within the region, a polygon to be resolved by the second mask based on the difference of density.
Public/Granted literature
- US20140282301A1 STITCH INSERTION FOR REDUCING COLOR DENSITY DIFFERENCES IN DOUBLE PATTERNING TECHNOLOGY (DPT) Public/Granted day:2014-09-18
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