发明授权
US08918745B2 Stitch insertion for reducing color density differences in double patterning technology (DPT) 有权
缝合插入以减少双重图案化技术(DPT)中的色彩密度差异

Stitch insertion for reducing color density differences in double patterning technology (DPT)
摘要:
Methodology enabling a reduction in a density difference between two complementary exposure masks and/or windows of a layout and an apparatus for performing the method are disclosed. Embodiments include: determining a layer of an IC design having features to be resolved by first and second masks; determining a difference of density by comparing a first density of a first set of the features with a second density of a second set of the features; determining a region on the layer of a first feature to be resolved by the first mask; and inserting, within the region, a polygon to be resolved by the second mask based on the difference of density.
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