发明授权
US08918745B2 Stitch insertion for reducing color density differences in double patterning technology (DPT)
有权
缝合插入以减少双重图案化技术(DPT)中的色彩密度差异
- 专利标题: Stitch insertion for reducing color density differences in double patterning technology (DPT)
- 专利标题(中): 缝合插入以减少双重图案化技术(DPT)中的色彩密度差异
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申请号: US13803048申请日: 2013-03-14
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公开(公告)号: US08918745B2公开(公告)日: 2014-12-23
- 发明人: Lynn Wang , Sriram Madhavan , Luigi Capodieci
- 申请人: Lynn Wang , Sriram Madhavan , Luigi Capodieci
- 申请人地址: KY Grand Cayman
- 专利权人: GlobalFoundries Inc.
- 当前专利权人: GlobalFoundries Inc.
- 当前专利权人地址: KY Grand Cayman
- 代理机构: Ditthavong & Steiner, P.C.
- 主分类号: G06F17/50
- IPC分类号: G06F17/50
摘要:
Methodology enabling a reduction in a density difference between two complementary exposure masks and/or windows of a layout and an apparatus for performing the method are disclosed. Embodiments include: determining a layer of an IC design having features to be resolved by first and second masks; determining a difference of density by comparing a first density of a first set of the features with a second density of a second set of the features; determining a region on the layer of a first feature to be resolved by the first mask; and inserting, within the region, a polygon to be resolved by the second mask based on the difference of density.
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