Invention Grant
- Patent Title: Infrared sensor comprising tunnel junction for measuring the deformation of a membrane
- Patent Title (中): 红外传感器包括用于测量膜变形的隧道结
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Application No.: US13807121Application Date: 2011-07-09
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Publication No.: US08919212B2Publication Date: 2014-12-30
- Inventor: Herbert Bousack , Helmut Soltner , Dirk Mayer , Marko Banzet
- Applicant: Herbert Bousack , Helmut Soltner , Dirk Mayer , Marko Banzet
- Applicant Address: DE Juelich
- Assignee: Forschungszentrum Juelich GmbH
- Current Assignee: Forschungszentrum Juelich GmbH
- Current Assignee Address: DE Juelich
- Agency: Jordan and Hamburg LLP
- Priority: DE102010027346 20100716
- International Application: PCT/DE2011/001419 WO 20110709
- International Announcement: WO2012/010147 WO 20120126
- Main IPC: G01L1/24
- IPC: G01L1/24 ; G01N21/84 ; G01J5/42
Abstract:
A sensor array for measuring the deformation of an area caused by a force, comprises a first strip and a second strip arranged in the same plane on the area so as to form a tunnel junction of which at least the first strip is movably arranged on the area so that the gap between the two strips is increased when the area is deformed as a result of the action of the force.
Public/Granted literature
- US20130205919A1 INFRARED SENSOR COMPRISING TUNNEL JUNCTION FOR MEASURING THE DEFORMATION OF A MEMBRANE Public/Granted day:2013-08-15
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