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US08922769B2 High resolution MEMS-based Hadamard spectroscopy 有权
高分辨率MEMS基Hadamard光谱

High resolution MEMS-based Hadamard spectroscopy
Abstract:
A spectrometer includes: a collimating element configured for collimating a beam of light into a first one of a cross-dispersing element and an echelle grating, the grating in optical communication with the cross-dispersing element; a focusing element for receiving the light from a second one of the cross-dispersing element and the echelle grating and focusing wavelengths of the light onto a spatial light modulator; the spatial light modulator configured for selectively directing the wavelengths onto a detector for detection. A method of use and the method of fabrication are provided.
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