发明授权
US08924896B2 Automated design layout pattern correction based on context-aware patterns 有权
基于上下文感知模式的自动设计布局模式校正

Automated design layout pattern correction based on context-aware patterns
摘要:
A process and apparatus are provided for automated pattern-based semiconductor design layout correction. Embodiments include scanning a drawn semiconductor design layout to determine a difficult-to-manufacture pattern within the drawn semiconductor design layout based on a match with a pre-characterized difficult-to-manufacture pattern, determining a corrected pattern based on a pre-determined correlation between the corrected pattern and the pre-characterized difficult-to-manufacture pattern, and replacing the difficult-to-manufacture pattern with the corrected pattern within the drawn semiconductor design layout.
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