Invention Grant
- Patent Title: Array substrate for fringe field switching mode liquid crystal display and method of manufacturing the same
- Patent Title (中): 用于条纹场开关模式液晶显示器的阵列衬底及其制造方法
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Application No.: US13895677Application Date: 2013-05-16
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Publication No.: US08927993B2Publication Date: 2015-01-06
- Inventor: Young-Ki Jung , Seok-Woo Lee , Kum-Mi Oh , Dong-Cheon Shin , In-Hyuk Song , Han-Seok Lee , Won-Keun Park
- Applicant: LG Display Co., Ltd.
- Applicant Address: KR Seoul
- Assignee: LG Display Co., Ltd.
- Current Assignee: LG Display Co., Ltd.
- Current Assignee Address: KR Seoul
- Agency: Morgan, Lewis & Bockius LLP
- Priority: KR10-2011-0064733 20110630
- Main IPC: H01L29/10
- IPC: H01L29/10 ; H01L27/14 ; H01L27/088 ; H01L29/66 ; H01L29/786 ; H01L27/12 ; G02F1/1343 ; G02F1/1362

Abstract:
A method of manufacturing an array substrate for a fringe field switching mode liquid crystal display includes: forming an auxiliary insulating layer on a second passivation layer and having a first thickness; forming first and second photoresist patterns on the auxiliary insulating layer and having second and third thicknesses, respectively, the second thickness greater than the third thickness; etching the auxiliary insulating layer, the second passivation layer and a first passivation layer to form a drain contact hole; performing an ashing to remove the second photoresist pattern and expose the auxiliary insulating layer therebelow; performing a dry etching to remove the auxiliary insulating layer not covered by the first photoresist pattern and expose the first passivation layer and to form an insulating pattern below the first photoresist pattern, the insulating pattern and the first photoresist pattern forming an undercut shape; forming a transparent conductive material layer having a fourth thickness less than the first thickness; and performing a lift-off process to remove the first photoresist pattern and the transparent conductive material layer thereon together and form a pixel electrode as a remaining portion of the transparent conductive material layer.
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Information query
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