Invention Grant
- Patent Title: Non-volatile memory device and method for fabricating the same
- Patent Title (中): 非易失性存储器件及其制造方法
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Application No.: US13618182Application Date: 2012-09-14
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Publication No.: US08928063B2Publication Date: 2015-01-06
- Inventor: Min-Soo Kim , Dong-Sun Sheen , Seung-Ho Pyi , Sung-Jin Whang
- Applicant: Min-Soo Kim , Dong-Sun Sheen , Seung-Ho Pyi , Sung-Jin Whang
- Applicant Address: KR Gyeonggi-do
- Assignee: SK Hynix Inc.
- Current Assignee: SK Hynix Inc.
- Current Assignee Address: KR Gyeonggi-do
- Agency: IP & T Group LLP
- Priority: KR10-2011-0140533 20111222
- Main IPC: H01L29/792
- IPC: H01L29/792 ; H01L21/20

Abstract:
A non-volatile memory device includes a channel layer vertically extending from a substrate, a plurality of inter-layer dielectric layers and a plurality of gate electrodes that are alternately stacked along the channel layer, and an air gap interposed between the channel layer and each of the plurality of gate electrodes. The non-volatile memory device may improve erase operation characteristics by suppressing back tunneling of electrons by substituting a charge blocking layer interposed between a gate electrode and a charge storage layer with an air gap, and a method for fabricating the non-volatile memory device.
Public/Granted literature
- US20130161726A1 NON-VOLATILE MEMORY DEVICE AND METHOD FOR FABRICATING THE SAME Public/Granted day:2013-06-27
Information query
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