发明授权
- 专利标题: Inertial sensor
- 专利标题(中): 惯性传感器
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申请号: US13227305申请日: 2011-09-07
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公开(公告)号: US08939023B2公开(公告)日: 2015-01-27
- 发明人: Won Kyu Jeung , Ho Seop Jeong
- 申请人: Won Kyu Jeung , Ho Seop Jeong
- 申请人地址: KR Gyunggi-Do
- 专利权人: Samsung Electro-Mechanics Co., Ltd.
- 当前专利权人: Samsung Electro-Mechanics Co., Ltd.
- 当前专利权人地址: KR Gyunggi-Do
- 代理机构: Ladas Parry, LLP
- 优先权: KR10-2011-0039427 20110427
- 主分类号: G01C19/56
- IPC分类号: G01C19/56 ; G01C19/5755 ; G01P15/08 ; G01P15/09
摘要:
Disclosed herein is an inertial sensor. An inertial sensor 100 according to a preferred embodiment of the present invention is configured to include a plate-shaped membrane 110 on which a hole 200 penetrating in a thickness direction is formed, a mass body 120 disposed on a bottom of a central portion 113 of the membrane 110, and a post 130 disposed on a bottom of an edge 115 of the membrane 110 to support the membrane 110 and surrounding the mass body 120. By the configuration, the preferred embodiment of the present invention reduces damping force due to viscosity of air at the time of vibration by forming the hole 200 on the membrane 110 to increase displacement or amplitude of the mass body 120, thereby increasing sensitivity of the inertial sensor 100.
公开/授权文献
- US20120272734A1 Inertial Sensor 公开/授权日:2012-11-01
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