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US08940229B2 Device for irradiating surfaces 有权
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Device for irradiating surfaces
Abstract:
In various embodiments, a device for irradiating surfaces is provided. The device may include a radiation emitter having a radiation emitter vessel, wherein the radiation emitter vessel has at least one tunnel-like passage; and a structure configured to allow a process gas to flow through the at least one tunnel-like passage.
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