发明授权
- 专利标题: Coating compositions suitable for use with an overcoated photoresist
- 专利标题(中): 适用于外涂光致抗蚀剂的涂料组合物
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申请号: US12658614申请日: 2010-02-08
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公开(公告)号: US08940472B2公开(公告)日: 2015-01-27
- 发明人: James F. Cameron , Jin Wuk Sung , John P. Amara , Greogory P. Prokopowicz , David A. Valeri
- 申请人: James F. Cameron , Jin Wuk Sung , John P. Amara , Greogory P. Prokopowicz , David A. Valeri
- 代理机构: Edwards Wildman Palmer LLP
- 代理商 Peter F. Corless
- 主分类号: G03F7/11
- IPC分类号: G03F7/11 ; G03F7/16 ; G03F7/30 ; G03F7/09 ; C08F220/36
摘要:
Organic coating compositions, particularly antireflective coating compositions, are provided that comprise that comprise a diene/dienophile reaction product. Preferred compositions of the invention are useful to reduce reflection of exposing radiation from a substrate back into an overcoated photoresist layer and/or function as a planarizing, conformal or via-fill layer.
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