发明授权
US08940472B2 Coating compositions suitable for use with an overcoated photoresist 有权
适用于外涂光致抗蚀剂的涂料组合物

Coating compositions suitable for use with an overcoated photoresist
摘要:
Organic coating compositions, particularly antireflective coating compositions, are provided that comprise that comprise a diene/dienophile reaction product. Preferred compositions of the invention are useful to reduce reflection of exposing radiation from a substrate back into an overcoated photoresist layer and/or function as a planarizing, conformal or via-fill layer.
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