发明授权
US08940566B2 Semiconductor device, display device, and production method for semiconductor device and display device
有权
半导体装置,显示装置以及半导体装置及显示装置的制造方法
- 专利标题: Semiconductor device, display device, and production method for semiconductor device and display device
- 专利标题(中): 半导体装置,显示装置以及半导体装置及显示装置的制造方法
-
申请号: US13883014申请日: 2011-11-01
-
公开(公告)号: US08940566B2公开(公告)日: 2015-01-27
- 发明人: Okifumi Nakagawa , Yoshimasa Chikama , Takeshi Hara , Hiromitsu Katsui
- 申请人: Okifumi Nakagawa , Yoshimasa Chikama , Takeshi Hara , Hiromitsu Katsui
- 申请人地址: JP Osaka
- 专利权人: Sharp Kabushiki Kaisha
- 当前专利权人: Sharp Kabushiki Kaisha
- 当前专利权人地址: JP Osaka
- 代理机构: Keating & Bennett, LLP
- 优先权: JP2010-247156 20101104
- 国际申请: PCT/JP2011/075155 WO 20111101
- 国际公布: WO2012/060362 WO 20120510
- 主分类号: H01L21/00
- IPC分类号: H01L21/00 ; H01L29/66 ; G02F1/1362 ; H01L27/12 ; H01L29/786 ; H01L29/417
摘要:
The semiconductor device (100) according to the present invention includes a gate electrode (102) of a TFT, a gate insulating layer (103) formed on the gate electrode (102), an oxide semiconductor layer (107) disposed on the gate insulating layer (103), a protecting layer (108) formed on the oxide semiconductor layer (107) by a spin-on-glass technique, and a source electrode (105) and a drain electrode (106) disposed on the protecting layer (108). Via a first contact hole (131) formed in the protecting layer (108), the source electrode (105) is electrically connected to the oxide semiconductor layer (104), and via a second contact hole (132), the drain electrode (106) is electrically connected to the oxide semiconductor layer (104).
公开/授权文献
信息查询
IPC分类: