Invention Grant
- Patent Title: Low-temperature fabrication of metal oxide thin films and nanomaterial-derived metal composite thin films
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Application No.: US13844771Application Date: 2013-03-15
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Publication No.: US08940579B2Publication Date: 2015-01-27
- Inventor: Antonio Facchetti , Tobin J. Marks , Mercouri G. Kanatzidis , Myung-Gil Kim , William Christopher Sheets , He Yan , Yu Xia
- Applicant: Northwestern University , Polyera Corporation
- Applicant Address: US IL Evanston US IL Skokie
- Assignee: Northwestern University,Polyera Corporation
- Current Assignee: Northwestern University,Polyera Corporation
- Current Assignee Address: US IL Evanston US IL Skokie
- Agent Karen K. Chan
- Main IPC: H01L21/441
- IPC: H01L21/441 ; H01L21/02 ; C23C18/12 ; H01L29/66 ; H01L21/285 ; H01L29/786
Abstract:
Disclosed are new methods of fabricating metal oxide thin films and nanomaterial-derived metal composite thin films via solution processes at low temperatures (
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