Invention Grant
US08940633B2 Methods of forming semiconductor device with self-aligned contact elements and the resulting devices
有权
用自对准接触元件形成半导体器件的方法和所得到的器件
- Patent Title: Methods of forming semiconductor device with self-aligned contact elements and the resulting devices
- Patent Title (中): 用自对准接触元件形成半导体器件的方法和所得到的器件
-
Application No.: US13785403Application Date: 2013-03-05
-
Publication No.: US08940633B2Publication Date: 2015-01-27
- Inventor: Xiuyu Cai , Ruilong Xie , John A. Iacoponi
- Applicant: GLOBALFOUNDARIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Amerson Law Firm, PLLC
- Main IPC: H01L21/4763
- IPC: H01L21/4763 ; H01L21/768 ; H01L23/48 ; H01L29/40 ; H01L29/78

Abstract:
One method discloses performing an etching process to form a contact opening in a layer of insulating material above at least a portion of a source/drain, region wherein, after the completion of the etching process, a portion of a gate structure of the transistor is exposed, selectively forming an oxidizable material on the exposed gate structure, converting at least a portion of the oxidizable material to an oxide material, and forming a conductive contact in the contact opening that is conductively coupled to the source/drain region. A novel transistor device disclosed herein includes an oxide material positioned between a conductive contact and a gate structure of the transistor, wherein the oxide material contacts the conductive contact and contacts a portion, but not all, of the exterior surface of the gate structure.
Public/Granted literature
- US20140252424A1 METHODS OF FORMING SEMICONDUCTOR DEVICE WITH SELF-ALIGNED CONTACT ELEMENTS AND THE RESULTING DEVICES Public/Granted day:2014-09-11
Information query
IPC分类: