Invention Grant
- Patent Title: Method of fabricating a graphene electronic device
- Patent Title (中): 制造石墨烯电子器件的方法
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Application No.: US13867535Application Date: 2013-04-22
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Publication No.: US08946094B2Publication Date: 2015-02-03
- Inventor: Yong Ju Yun , Kibong Song
- Applicant: Electronics and Telecommunications Research Institute
- Applicant Address: KR Daejeon
- Assignee: Electronics and Telecommunications Research Institute
- Current Assignee: Electronics and Telecommunications Research Institute
- Current Assignee Address: KR Daejeon
- Agency: Rabin & Berdo, P.C.
- Priority: KR10-2012-0054437 20120522; KR10-2012-0086796 20120808
- Main IPC: H01L21/31
- IPC: H01L21/31 ; H01L21/02 ; H01L29/16 ; H01L29/778 ; H01L29/417 ; H01L29/06

Abstract:
A method of fabricating a graphene electronic device includes (a) forming a first electrode and a second electrode spaced apart from each other, on a substrate; (b) forming supporting patterns on the first electrode and the second electrode; (c) coating the supporting patterns with graphene-oxide-containing solution to form composite patterns; and (d) separating the supporting patterns from the composite patterns. The step of forming supporting patterns may expose end portions of the first and second electrodes and the substrate between the end portions and be accomplished by providing a mask on the first and second electrodes; and electrospinning a polymer solution on the first and second electrodes with the mask. The supporting patterns may be composed of polymer fibers.
Public/Granted literature
- US20130313523A1 GRAPHENE ELECTRONIC DEVICE AND METHOD OF FABRICATING THE SAME Public/Granted day:2013-11-28
Information query
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