发明授权
- 专利标题: Micromachined resonant magnetic field sensors
- 专利标题(中): 微机械谐振磁场传感器
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申请号: US13004383申请日: 2011-01-11
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公开(公告)号: US08947081B2公开(公告)日: 2015-02-03
- 发明人: Joseph Seeger , Chiung C. Lo , Baris Cagdaser , Derek Shaeffer
- 申请人: Joseph Seeger , Chiung C. Lo , Baris Cagdaser , Derek Shaeffer
- 申请人地址: US CA San Jose
- 专利权人: Invensense, Inc.
- 当前专利权人: Invensense, Inc.
- 当前专利权人地址: US CA San Jose
- 代理机构: Sawyer Law Group, P.C.
- 主分类号: G01R33/02
- IPC分类号: G01R33/02 ; G01R33/038 ; G01R33/028
摘要:
A micromachined magnetic field sensor is disclosed. The micromachined magnetic field sensor includes a substrate; and a drive subsystem partially supported by the substrate with a plurality of beams, and at least one anchor; a mechanism for providing an electrical current through the drive subsystem along a first axis; and Lorentz force acting on the drive subsystem along a second axis in response to a magnetic field vector along a third axis. The micromachined magnetic field sensor also includes a position transducer to detect the motion of the drive subsystem and an electrostatic offset cancellation mechanism coupled to the drive subsystem.
公开/授权文献
- US20120176129A1 MICROMACHINED RESONANT MAGNETIC FIELD SENSORS 公开/授权日:2012-07-12
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