Invention Grant
US08951638B2 Silicon carbide powder for producing silicon carbide single crystal and a method for producing the same 有权
用于生产碳化硅单晶的碳化硅粉末及其制造方法

Silicon carbide powder for producing silicon carbide single crystal and a method for producing the same
Abstract:
A silicon carbide powder for the production of a silicon carbide single crystal has an average particle diameter of 100 μm or more and 700 μm or less and a specific surface area of 0.05 m2/g or more and 0.30 m2/g or less. A method for producing a silicon carbide powder for the production of the silicon carbide single crystal including sintering a silicon carbide powder having an average particle diameter of 20 μm or less under pressure of 70 MPa or less at a temperature of 1900° C. or more and 2400° C. or less and in a non-oxidizing atmosphere, thereby obtaining a sintered body having a density of 1.29 g/cm3 or more; adjusting particle size by means of pulverization of the sintered body; and removing impurities by means of an acid treatment.
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