Invention Grant
- Patent Title: Manufacturing method for semiconductor device having metal gate
- Patent Title (中): 具有金属栅极的半导体器件的制造方法
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Application No.: US13454337Application Date: 2012-04-24
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Publication No.: US08951855B2Publication Date: 2015-02-10
- Inventor: Chien-Ming Lai , Rai-Min Huang , Tong-Jyun Huang , Che-Hua Hsu , Yi-Wen Chen
- Applicant: Chien-Ming Lai , Rai-Min Huang , Tong-Jyun Huang , Che-Hua Hsu , Yi-Wen Chen
- Applicant Address: TW Hsinchu
- Assignee: United Microelectronics Corp.
- Current Assignee: United Microelectronics Corp.
- Current Assignee Address: TW Hsinchu
- Agency: J.C. Patents
- Main IPC: H01L21/8238
- IPC: H01L21/8238

Abstract:
A manufacturing method for a semiconductor device having a metal gate is provided. First and second gate trenches are respectively formed in first and second semiconductor devices. A work-function metal layer is formed in the first and second gate trenches. A shielding layer is formed on the substrate. A first removing step is performed, so that the remaining shielding layer is at bottom of the second gate trench and fills up the first gate trench. A second removing step is performed, so that the remaining shielding layer is at bottom of the first gate trench to expose the work-function metal layer at sidewall of the first gate trench and in the second gate trench. The work-function metal layer not covered by the remaining shielding layer is removed, so that the remaining work-function metal layer is only at bottom of the first gate trench. The remaining shielding layer is removed.
Public/Granted literature
- US20130280900A1 MANUFACTURING METHOD FOR SEMICONDUCTOR DEVICE HAVING METAL GATE Public/Granted day:2013-10-24
Information query
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