Invention Grant
US08951920B2 Contact landing pads for a semiconductor device and methods of making same
有权
用于半导体器件的触点着陆焊盘及其制造方法
- Patent Title: Contact landing pads for a semiconductor device and methods of making same
- Patent Title (中): 用于半导体器件的触点着陆焊盘及其制造方法
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Application No.: US14446797Application Date: 2014-07-30
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Publication No.: US08951920B2Publication Date: 2015-02-10
- Inventor: Frank Jakubowski , Juergen Faul
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Amerson Law Firm, PLLC
- Main IPC: H01L21/31
- IPC: H01L21/31 ; H01L23/495

Abstract:
A method of forming a conductive contact landing pad and a transistor includes forming first and second spaced-apart active regions in a semiconducting substrate, forming a layer of gate insulation material on the first and second active regions, and performing an etching process to remove the layer of gate insulation material formed on the second active region so as to thereby expose the second active region. The method further includes performing a common process operation to form a gate electrode structure above the layer of gate insulation material on the first active region for the transistor and the conductive contact landing pad that is conductively coupled to the second active region, and forming a contact to the conductive contact landing pad.
Public/Granted literature
- US20140335668A1 CONTACT LANDING PADS FOR A SEMICONDUCTOR DEVICE AND METHODS OF MAKING SAME Public/Granted day:2014-11-13
Information query
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