Invention Grant
- Patent Title: Flexible stop for an acceleration sensor
- Patent Title (中): 灵活的加速度传感器停止
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Application No.: US13889814Application Date: 2013-05-08
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Publication No.: US08952466B2Publication Date: 2015-02-10
- Inventor: Johannes Classen , Jochen Reinmuth , Guenther-Nino-Carlo Ullrich
- Applicant: Johannes Classen , Jochen Reinmuth , Guenther-Nino-Carlo Ullrich
- Applicant Address: DE Stuttgart
- Assignee: Robert Bosch GmbH
- Current Assignee: Robert Bosch GmbH
- Current Assignee Address: DE Stuttgart
- Agency: Kenyon & Kenyon LLP
- Priority: DE102012207939 20120511
- Main IPC: B81B3/00
- IPC: B81B3/00 ; G01P15/08
Abstract:
A micromechanical acceleration sensor includes a seismic mass and a substrate that has a reference electrode. The seismic mass is deflectable in a direction perpendicular to the reference electrode, and the seismic mass has a flexible stop in the deflection direction. The flexible stop of the seismic mass includes an elastic layer.
Public/Granted literature
- US20130299923A1 FLEXIBLE STOP FOR AN ACCELERATION SENSOR Public/Granted day:2013-11-14
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