发明授权
US08952468B2 Acoustic sensor, acoustic transducer, microphone using the acoustic transducer, and method for manufacturing the acoustic transducer
有权
声传感器,声换能器,使用声换能器的麦克风,以及用于制造声换能器的方法
- 专利标题: Acoustic sensor, acoustic transducer, microphone using the acoustic transducer, and method for manufacturing the acoustic transducer
- 专利标题(中): 声传感器,声换能器,使用声换能器的麦克风,以及用于制造声换能器的方法
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申请号: US13699989申请日: 2011-04-20
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公开(公告)号: US08952468B2公开(公告)日: 2015-02-10
- 发明人: Koichi Ishimoto , Yoshitaka Tatara , Shin Inuzuka , Sebastiano Conti
- 申请人: Koichi Ishimoto , Yoshitaka Tatara , Shin Inuzuka , Sebastiano Conti
- 申请人地址: JP Kyoto-shi, Kyoto IT Agrate Brianza Milan
- 专利权人: OMRON Corporation,STMicroelectronics Srl
- 当前专利权人: OMRON Corporation,STMicroelectronics Srl
- 当前专利权人地址: JP Kyoto-shi, Kyoto IT Agrate Brianza Milan
- 代理机构: Osha Liang LLP
- 优先权: JP2010-121681 20100527
- 国际申请: PCT/JP2011/059710 WO 20110420
- 国际公布: WO2011/148740 WO 20111201
- 主分类号: H01L29/84
- IPC分类号: H01L29/84 ; H04R19/00 ; H04R19/04
摘要:
In an acoustic sensor, a conductive vibrating membrane and a fixed electrode plate are disposed above a silicon substrate with an air gap provided therebetween, and the substrate has an impurity added to a surface thereof. A microphone includes an acoustic transducer; and an acquiring section that acquires a change in pressure as detected by the acoustic transducer. A method for manufacturing an acoustic transducer including a semiconductor substrate, a vibrating membrane, which is conductive, and a fixed electrode plate and detecting a pressure according to a change in capacitance between the vibrating membrane and the fixed electrode plate, the method includes an impurity adding step of adding an impurity to a surface of the semiconductor substrate; and a forming step of forming the vibrating membrane and the fixed electrode plate above the semiconductor substrate to which the impurity has been added.
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