Invention Grant
- Patent Title: Calculation method for generating layout pattern in photomask
- Patent Title (中): 在光掩模中生成布局图案的计算方法
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Application No.: US14069391Application Date: 2013-11-01
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Publication No.: US08954919B1Publication Date: 2015-02-10
- Inventor: En-Chiuan Liou , Sho-Shen Lee , Wen-Liang Huang , Chang-Mao Wang , Kai-Lin Chuang , Yu-Chin Huang
- Applicant: United Microelectronics Corp.
- Applicant Address: TW Science-Based Industrial Park, Hsin-Chu
- Assignee: United Microelectronics Corp.
- Current Assignee: United Microelectronics Corp.
- Current Assignee Address: TW Science-Based Industrial Park, Hsin-Chu
- Agent Winston Hsu; Scott Margo
- Main IPC: G06F17/50
- IPC: G06F17/50

Abstract:
A calculation method for generating a layout pattern in a photomask includes at least the following steps. A two-dimensional design layout including several geometric patterns distributed in a plane is provided to a computer system. The computer system is used to mark portions of the geometric patterns and generate at least one marked geometric pattern and at least one non-marked geometric pattern. The marked geometric pattern is then simulated and corrected by the computer system so as to generate a 3-D design layout. Through the simulation and correction, the marked geometric pattern and the non-marked geometric pattern are arranged alternately along an axis orthogonal to the plane. The 3-D design layout is outputted to a mask-making system afterwards.
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