Invention Grant
US08956325B2 Piezoelectric microfluidic pumping device and method for using the same 有权
压电微流体泵送装置及其使用方法

Piezoelectric microfluidic pumping device and method for using the same
Abstract:
Disclosed herein is a microfluidic pumping device having a piezoelectric member positioned above a displaceable membrane. A voltage is applied across the piezoelectric member causing the piezoelectric member to displace the membrane. Displacement of the membrane increases and decreases pressure in a cavity that is below the membrane. The increases and decreases in pressure actuate cantilevered check valve members to facilitate unidirectional liquid flow through the pumping device.
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