Invention Grant
- Patent Title: Method for manufacturing a micromechanical structure, and micromechanical structure
- Patent Title (中): 微机械结构的制造方法和微机械结构
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Application No.: US13586226Application Date: 2012-08-15
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Publication No.: US08956544B2Publication Date: 2015-02-17
- Inventor: Johannes Classen , Jochen Reinmuth , Sebastian Guenther , Pia Bustian-Todorov
- Applicant: Johannes Classen , Jochen Reinmuth , Sebastian Guenther , Pia Bustian-Todorov
- Applicant Address: DE Stuttgart
- Assignee: Robert Bosch GmbH
- Current Assignee: Robert Bosch GmbH
- Current Assignee Address: DE Stuttgart
- Agency: Kenyon & Kenyon LLP
- Priority: DE102011081033 20110816
- Main IPC: C23F1/00
- IPC: C23F1/00 ; G01C19/5783 ; B81C1/00 ; G01P15/08

Abstract:
A method for manufacturing a micromechanical structure, and a micromechanical structure. The micromechanical structure encompasses a first micromechanical functional layer, made of a first material, that comprises a buried conduit having a first end and a second end; a micromechanical sensor structure having a cap in a second micromechanical functional layer that is disposed above the first micromechanical functional layer; an edge region in the second micromechanical functional layer, such that the edge region surrounds the sensor structure and defines an inner side containing the sensor structure and an outer side facing away from the sensor structure; such that the first end is located on the outer side and the second end on the inner side.
Public/Granted literature
- US20130042681A1 METHOD FOR MANUFACTURING A MICROMECHANICAL STRUCTURE, AND MICROMECHANICAL STRUCTURE Public/Granted day:2013-02-21
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