Invention Grant
US08956544B2 Method for manufacturing a micromechanical structure, and micromechanical structure 有权
微机械结构的制造方法和微机械结构

Method for manufacturing a micromechanical structure, and micromechanical structure
Abstract:
A method for manufacturing a micromechanical structure, and a micromechanical structure. The micromechanical structure encompasses a first micromechanical functional layer, made of a first material, that comprises a buried conduit having a first end and a second end; a micromechanical sensor structure having a cap in a second micromechanical functional layer that is disposed above the first micromechanical functional layer; an edge region in the second micromechanical functional layer, such that the edge region surrounds the sensor structure and defines an inner side containing the sensor structure and an outer side facing away from the sensor structure; such that the first end is located on the outer side and the second end on the inner side.
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