Invention Grant
- Patent Title: Contact structure for a semiconductor device and methods of making same
- Patent Title (中): 半导体器件的接触结构及其制造方法
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Application No.: US13689979Application Date: 2012-11-30
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Publication No.: US08956928B2Publication Date: 2015-02-17
- Inventor: Frank Jakubowski , Juergen Faul
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES Inc
- Current Assignee: GLOBALFOUNDRIES Inc
- Current Assignee Address: KY Grand Cayman
- Agency: Amerson Law Firm, PLLC
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L21/60 ; H01L29/66 ; H01L27/11 ; H01L21/8234 ; H01L27/02 ; H01L27/088

Abstract:
One device includes first and second spaced-apart active regions formed in a semiconducting substrate, a layer of gate insulation material positioned on the first active region, and a conductive line feature that has a first portion positioned above the gate insulation material and a second portion that conductively contacts the second active region. One method includes forming first and second spaced-apart active regions in a semiconducting substrate, forming a layer of gate insulation material on the first and second active regions, performing an etching process to remove a portion of the gate insulation material formed on the second active region to expose a portion of the second active region, and forming a conductive line feature that comprises a first portion positioned above the layer of gate insulation material formed on the first active region and a second portion that conductively contacts the exposed portion of the second active region.
Public/Granted literature
- US20140151816A1 NOVEL CONTACT STRUCTURE FOR A SEMICONDUCTOR DEVICE AND METHODS OF MAKING SAME Public/Granted day:2014-06-05
Information query
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