Invention Grant
- Patent Title: High-voltage Schottky diode and manufacturing method thereof
- Patent Title (中): 高电压肖特基二极管及其制造方法
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Application No.: US14130449Application Date: 2012-10-23
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Publication No.: US08957494B2Publication Date: 2015-02-17
- Inventor: Lihui Gu
- Applicant: CSMC Technologies FAB1 Co., Ltd.
- Applicant Address: CN Jiangsu
- Assignee: CSMC Technologies FAB1 Co., Ltd.
- Current Assignee: CSMC Technologies FAB1 Co., Ltd.
- Current Assignee Address: CN Jiangsu
- Agency: Muncy, Geissler, Olds & Lowe, P.C.
- Priority: CN201110339641 20111031
- International Application: PCT/CN2012/083344 WO 20121023
- International Announcement: WO2013/064024 WO 20130510
- Main IPC: H01L29/872
- IPC: H01L29/872 ; H01L29/06 ; H01L29/66 ; H01L29/40 ; H01L29/10

Abstract:
A high-voltage Schottky diode and a manufacturing method thereof are disclosed in the present disclosure. The diode includes: a P-type substrate and two N-type buried layers, a first N-type buried layer is located below a cathode lead-out area, and a second N-type buried layer is located below a cathode region; an epitaxial layer; two N-type well regions located on the epitaxial layer, a first N-type well region is a lateral drift region and it is provided with a cathode lead-out region, and a second N-type well region is located on the second N-type buried layer and it is a cathode region; a first P-type well region located on the second N-type buried layer and surrounding the cathode region; a field oxide isolation region located on the lateral drift region; an anode located on the cathode region and a cathode located on the surface of the cathode lead-out region.
Public/Granted literature
- US20140145290A1 HIGH-VOLTAGE SCHOTTKY DIODE AND MANUFACTURING METHOD THEREOF Public/Granted day:2014-05-29
Information query
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