Invention Grant
US08962399B2 Method of making a semiconductor layer having at least two different thicknesses
有权
制造具有至少两个不同厚度的半导体层的方法
- Patent Title: Method of making a semiconductor layer having at least two different thicknesses
- Patent Title (中): 制造具有至少两个不同厚度的半导体层的方法
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Application No.: US14177593Application Date: 2014-02-11
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Publication No.: US08962399B2Publication Date: 2015-02-24
- Inventor: Maud Vinet , Yves Morand , Heimanu Niebojewski
- Applicant: Commissariat a l'Energie Atomique et aux Ene Alt , STMicroelectronics (Crolles 2) SAS , STMicroelectronics SA
- Applicant Address: FR Paris FR Crolles FR Montrouge
- Assignee: Commissariat a l'Energie Atomique et aux Energies Alternatives,STMicroelectronics (Crolles 2) SAS,STMicroelectronics SA
- Current Assignee: Commissariat a l'Energie Atomique et aux Energies Alternatives,STMicroelectronics (Crolles 2) SAS,STMicroelectronics SA
- Current Assignee Address: FR Paris FR Crolles FR Montrouge
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: FR1351144 20130211
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L29/66 ; H01L21/02 ; H01L21/306 ; H01L21/3065 ; H01L21/762

Abstract:
A method is provided for producing a semiconductor layer having at least two different thicknesses from a stack of the semiconductor on insulator type including at least one substrate on which an insulating layer and a first semiconductor layer are successively disposed, the method including etching the first layer so that said layer is continuous and includes at least one first region having a thickness less than that of at least one second region; oxidizing the first layer to form an electrically insulating oxide film on a surface thereof so that, in the first region, the oxide film extends as far as the insulating layer; partly removing the oxide film to bare the first layer outside the first region; forming a second semiconductor layer on the stack, to form, with the first layer, a third continuous semiconductor layer having a different thickness than that of the first and second regions.
Public/Granted literature
- US20140370666A1 METHOD OF MAKING A SEMICONDUCTOR LAYER HAVING AT LEAST TWO DIFFERENT THICKNESSES Public/Granted day:2014-12-18
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