发明授权
- 专利标题: Method of fabricating thin film transistor substrate and organic light emitting display device using the same
- 专利标题(中): 制造薄膜晶体管基板的方法和使用其的有机发光显示装置
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申请号: US13534245申请日: 2012-06-27
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公开(公告)号: US08969128B2公开(公告)日: 2015-03-03
- 发明人: Yoon-dong Cho , Jong-Hyun Park , Soo-Young Yoon , Mi-Jung Lee , Jae-kyung Choi
- 申请人: Yoon-dong Cho , Jong-Hyun Park , Soo-Young Yoon , Mi-Jung Lee , Jae-kyung Choi
- 申请人地址: KR Seoul
- 专利权人: LG Display Co., Ltd.
- 当前专利权人: LG Display Co., Ltd.
- 当前专利权人地址: KR Seoul
- 代理机构: Morgan, Lewis & Bockius LLP
- 优先权: KR10-2012-0025458 20120313
- 主分类号: H01L51/40
- IPC分类号: H01L51/40
摘要:
A method of fabricating a thin film transistor substrate includes: forming a polymer layer on a glass substrate; forming a passivation layer on the polymer layer; forming a thin film transistor array on the passivation layer; and separating the glass substrate from the polymer layer by irradiating a laser from a rear surface of the glass substrate.