发明授权
- 专利标题: Imprint method and imprint apparatus
- 专利标题(中): 压印方法和压印装置
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申请号: US13023225申请日: 2011-02-08
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公开(公告)号: US08973494B2公开(公告)日: 2015-03-10
- 发明人: Masayuki Hatano , Ikuo Yoneda , Tetsuro Nakasugi , Kenji Ooki
- 申请人: Masayuki Hatano , Ikuo Yoneda , Tetsuro Nakasugi , Kenji Ooki
- 申请人地址: JP Tokyo
- 专利权人: Kabushiki Kaisha Toshiba
- 当前专利权人: Kabushiki Kaisha Toshiba
- 当前专利权人地址: JP Tokyo
- 代理机构: Finnegan, Henderson, Farabow, Garrett & Dunner, L.L.P.
- 优先权: JP2010-25239 20100208
- 主分类号: G03F7/00
- IPC分类号: G03F7/00 ; B82Y10/00
摘要:
According to one embodiment, an imprint method is disclosed. The method can include forming a liquid droplet of a transfer material with a volume greater than a predetermined reference volume by dropping the transfer material onto a major surface of a processing substrate. The method can include reducing the volume of the liquid droplet to be less than the reference volume by volatilizing the liquid droplet. In addition, the method can include filling the transfer material into a recess provided in a transfer surface of a template by bringing the liquid droplet having the volume reduced to be less than the reference volume into contact with the transfer surface of the template.
公开/授权文献
- US20110192300A1 IMPRINT METHOD AND IMPRINT APPARATUS 公开/授权日:2011-08-11
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