发明授权
- 专利标题: Ultasound probe providing dual backing layer
- 专利标题(中): 超声探头提供双重背衬层
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申请号: US13976758申请日: 2012-01-05
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公开(公告)号: US08975713B2公开(公告)日: 2015-03-10
- 发明人: Akifumi Sako , Tomoko Takenaka , Kazunari Ishida
- 申请人: Akifumi Sako , Tomoko Takenaka , Kazunari Ishida
- 申请人地址: JP Tokyo
- 专利权人: Hitachi Medical Corporation
- 当前专利权人: Hitachi Medical Corporation
- 当前专利权人地址: JP Tokyo
- 代理机构: Brundidge & Stanger, P.C.
- 优先权: JP2011-001485 20110106
- 国际申请: PCT/JP2012/000047 WO 20120105
- 国际公布: WO2012/093662 WO 20120712
- 主分类号: A61B8/14
- IPC分类号: A61B8/14 ; A61B8/00 ; H04R31/00 ; H01L21/00 ; H01L29/84 ; B06B1/02 ; G10K11/00
摘要:
Disclosed is an ultrasonic probe comprising: CMUT cells (13) that mutually convert ultrasonic waves and electrical signals; a semiconductor substrate (15) that has a plurality of the CMUT cells (13) formed on the surface thereof; an acoustic lens (3) that is provided on the front face side of the CMUT cells (13); and a backing layer (5) that is provided on the rear face side of the semiconductor substrate (15). The backing layer (5) is formed by a first backing layer (27) that makes contact with the semiconductor substrate, and a second backing layer (29) that is provided on the rear face side of the backing layer (27). The acoustic impedance of the backing layer (27) is set based on the sheet thickness of the semiconductor substrate (15). The backing layer (29) is formed by attenuating material capable of attenuating ultrasonic waves transmitted through the backing layer (27). Multiple reflection of reflection echoes is suppressed by setting the acoustic impedance of the backing layer (29) to match the acoustic impedance of the backing layer (27).
公开/授权文献
- US20130285174A1 ULTRASOUND PROBE 公开/授权日:2013-10-31
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