Invention Grant
- Patent Title: System and method for overhead cross-system transportation
- Patent Title (中): 架空跨系统运输的系统和方法
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Application No.: US12764493Application Date: 2010-04-21
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Publication No.: US08977387B2Publication Date: 2015-03-10
- Inventor: Wei-Cheng Wang , Feng-Ning Lee
- Applicant: Wei-Cheng Wang , Feng-Ning Lee
- Applicant Address: TW
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW
- Agency: Lowe Hauptman & Ham, LLP
- Main IPC: G06F7/00
- IPC: G06F7/00 ; H01L21/677
Abstract:
A system for managing semiconductor production includes a conveyor to convey a wafer carrier to or from an overhead hoist transfer system. The system also includes a cross-system transport apparatus to transfer the wafer carrier between the conveyor and an overhead shuttle system.
Public/Granted literature
- US20110106300A1 SYSTEM AND METHOD FOR OVERHEAD CROSS-SYSTEM TRANSPORTATION Public/Granted day:2011-05-05
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