发明授权
- 专利标题: Image sensor with improved dark current performance
- 专利标题(中): 具有改善暗电流性能的图像传感器
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申请号: US14225509申请日: 2014-03-26
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公开(公告)号: US08980674B2公开(公告)日: 2015-03-17
- 发明人: Wei-Chih Weng , Hsun-Ying Huang , Yung-Cheng Chang , Jin-Hong Cho
- 申请人: Taiwan Semiconductor Manufacturing Company Ltd.
- 申请人地址: TW Hsin-Chu
- 专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人地址: TW Hsin-Chu
- 代理机构: Haynes and Boone, LLP
- 主分类号: H01L21/00
- IPC分类号: H01L21/00 ; H01L31/102
摘要:
Provided is a semiconductor image sensor device. The image sensor device includes a semiconductor substrate that includes an array region and a black level correction region. The array region contains a plurality of radiation-sensitive pixels. The black level correction region contains one or more reference pixels. The substrate has a front side and a back side. The image sensor device includes a first compressively-stressed layer formed on the back side of the substrate. The first compressively-stressed layer contains silicon nitride. The image sensor device includes a metal shield formed on the compressively-stressed layer. The metal shield is formed over at least a portion of the black level correction region. The image sensor device includes a second compressively-stressed layer formed on the metal shield and the first compressively-stressed layer. The second compressively-stressed layer contains silicon oxide. A sidewall of the metal shield is protected by the second compressively-stressed layer.
公开/授权文献
- US20140197513A1 Image Sensor with Improved Dark Current Performance 公开/授权日:2014-07-17
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