Invention Grant
US08987027B2 Two doping regions in lightly doped drain for thin film transistors and associated doping processes
有权
用于薄膜晶体管和相关掺杂工艺的轻掺杂漏极中的两个掺杂区域
- Patent Title: Two doping regions in lightly doped drain for thin film transistors and associated doping processes
- Patent Title (中): 用于薄膜晶体管和相关掺杂工艺的轻掺杂漏极中的两个掺杂区域
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Application No.: US13601535Application Date: 2012-08-31
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Publication No.: US08987027B2Publication Date: 2015-03-24
- Inventor: Cheng-Ho Yu , Young Bae Park , Shih Chang Chang
- Applicant: Cheng-Ho Yu , Young Bae Park , Shih Chang Chang
- Applicant Address: US CA Cupertino
- Assignee: Apple Inc.
- Current Assignee: Apple Inc.
- Current Assignee Address: US CA Cupertino
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L29/786 ; H01L27/12

Abstract:
A method is provided for fabricating thin-film transistors (TFTs) for an LCD having an array of pixels. The method includes depositing a first photoresist layer over a portion of a TFT stack that includes a conductive gate layer, and a semiconductor layer. The method also includes doping the exposed semiconductor layer with a first doping dose. The method further includes etching a portion of the conductive gate layer to expose a portion of the semiconductor layer, and doping the exposed portion of the semiconductor layer with a second doping dose. The method also includes depositing a second photoresist layer over a first portion of the doped semiconductor layer in an active area of the pixels to expose a second portion of the doped semiconductor layer in an area surrounding the active area, and doping the second portion of the doped semiconductor layer with a third doping dose.
Public/Granted literature
- US20140061656A1 Two Doping Regions in Lightly Doped Drain for Thin Film Transistors and Associated Doping Processes Public/Granted day:2014-03-06
Information query
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