Invention Grant
- Patent Title: Methods of forming semiconductor structures including bodies of semiconductor material
- Patent Title (中): 形成包括半导体材料的半导体结构的方法
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Application No.: US14176780Application Date: 2014-02-10
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Publication No.: US08987108B2Publication Date: 2015-03-24
- Inventor: Sanh D. Tang , David H. Wells , Tuman E. Allen
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: TraskBritt
- Main IPC: H01L21/762
- IPC: H01L21/762 ; H01L21/84 ; H01L29/66 ; H01L27/102 ; H01L29/788 ; H01L29/792 ; H01L27/115 ; H01L27/12 ; H01L27/108

Abstract:
Semiconductor structures that include bodies of a semiconductor material spaced apart from an underlying substrate. The bodies may be physically separated from the substrate by at least one of a dielectric material, an open volume and a conductive material. The bodies may be electrically coupled by one or more conductive structures, which may be used as an interconnect structure to electrically couple components of memory devices. By providing isolation between the bodies, the semiconductor structure provides the properties of a conventional SOI substrate (e.g., high speed, low power, increased device density and isolation) while substantially reducing fabrication acts and costs associated with such SOI substrates. Additionally, the semiconductor structures of the present disclosure provide reduced parasitic coupling and current leakage due to the isolation of the bodies by the intervening dielectric material.
Public/Granted literature
- US20140206175A1 METHODS OF FORMING SEMICONDUCTOR STRUCTURES INCLUDING BODIES OF SEMICONDUCTOR MATERIAL Public/Granted day:2014-07-24
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