发明授权
- 专利标题: Vertical type semiconductor devices including oxidation target layers
- 专利标题(中): 包括氧化靶层的垂直型半导体器件
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申请号: US13971347申请日: 2013-08-20
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公开(公告)号: US08987805B2公开(公告)日: 2015-03-24
- 发明人: Phil-Ouk Nam , Jun-Kyu Yang , Byong-Hyun Jang , Ki-Hyun Hwang , Jae-Young Ahn
- 申请人: Phil-Ouk Nam , Jun-Kyu Yang , Byong-Hyun Jang , Ki-Hyun Hwang , Jae-Young Ahn
- 申请人地址: KR
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人地址: KR
- 代理机构: Myers Bigel Sibley & Sajovec, P.A.
- 优先权: KR10-2012-0093415 20120827; KR10-2013-0004203 20130115
- 主分类号: H01L29/792
- IPC分类号: H01L29/792 ; H01L27/115 ; H01L29/788
摘要:
A vertical type semiconductor device can include a vertical pillar structure that includes a channel pattern with an outer wall. Horizontal insulating structures can be vertically spaced apart from one another along the vertical pillar structure to define first vertical gaps therebetween at first locations away from the outer wall and to define second vertical gaps therebetween at the outer wall, where the second vertical gaps are wider than the first vertical gaps. Horizontal wordline structures can be conformally located in the first and second vertical gaps between the vertically spaced apart horizontal insulating structures, so that the horizontal wordline structures can be vertically thinner across the first vertical gaps than across the second vertical gaps.
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