Invention Grant
- Patent Title: Interferometric encoder systems
- Patent Title (中): 干涉编码器系统
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Application No.: US14044222Application Date: 2013-10-02
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Publication No.: US08988690B2Publication Date: 2015-03-24
- Inventor: Leslie L. Deck , Peter J. de Groot , Michael Schroeder
- Applicant: Zygo Corporation
- Applicant Address: US CT Middlefield
- Assignee: Zygo Corporation
- Current Assignee: Zygo Corporation
- Current Assignee Address: US CT Middlefield
- Agency: Fish & Richardson P.C.
- Main IPC: G01B9/02
- IPC: G01B9/02 ; G01D5/26 ; G01D5/38

Abstract:
A method for determining information about changes along a degree of freedom of an encoder scale includes directing a first beam and a second beam along different paths and combining the first and second beams to form an output beam, where the first and second beams are derived from a common source, the first and second beams have different frequencies, where the first beam contacts the encoder scale at a non-Littrow angle and the first beam diffracts from the encoder scale at least once; detecting an interference signal based on the output beam, the interference signal including a heterodyne phase related to an optical path difference between the first beam and the second beam; and determining information about a degree of freedom of the encoder scale based on the heterodyne phase.
Public/Granted literature
- US20140049782A1 INTERFEROMETRIC ENCODER SYSTEMS Public/Granted day:2014-02-20
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