Invention Grant
US08989478B2 Method and system for visualization of semiconductor wafer inspection data acquired in a photovoltaic cell production process
有权
在光伏电池生产过程中获取的半导体晶片检查数据的可视化方法和系统
- Patent Title: Method and system for visualization of semiconductor wafer inspection data acquired in a photovoltaic cell production process
- Patent Title (中): 在光伏电池生产过程中获取的半导体晶片检查数据的可视化方法和系统
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Application No.: US13559175Application Date: 2012-07-26
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Publication No.: US08989478B2Publication Date: 2015-03-24
- Inventor: Robert J. Salter
- Applicant: Robert J. Salter
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Corporation
- Current Assignee: KLA-Tencor Corporation
- Current Assignee Address: US CA Milpitas
- Agency: Suiter Swantz pc llo
- Main IPC: G06K9/00
- IPC: G06K9/00 ; G01N21/88 ; G01N21/95

Abstract:
A system for providing visualization of semiconductor wafer inspection data acquired during in a photovoltaic cell production process includes a display device, a user interface device, and a computer control system configured for: receiving one or more inspection data sets acquired from each of a plurality of semiconductor wafers using a plurality of wafer process tools of a photovoltaic cell production line; generating an aggregated hierarchical wafer data gallery utilizing the received one or more inspection data sets; and displaying at least a portion of the aggregated hierarchical wafer data gallery in the gallery display area of the display device.
Public/Granted literature
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