Invention Grant
- Patent Title: GST film thickness monitoring
- Patent Title (中): GST膜厚度监测
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Application No.: US12697177Application Date: 2010-01-29
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Publication No.: US08989890B2Publication Date: 2015-03-24
- Inventor: Kun Xu , Feng Liu , Dominic J. Benvegnu , Boguslaw A. Swedek , Yuchun Wang , Wen-Chiang Tu , Laksh Karuppiah
- Applicant: Kun Xu , Feng Liu , Dominic J. Benvegnu , Boguslaw A. Swedek , Yuchun Wang , Wen-Chiang Tu , Laksh Karuppiah
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Fish & Richardson P.C.
- Main IPC: G06F19/00
- IPC: G06F19/00 ; F04D27/02 ; F04B19/16 ; F04D23/00 ; F01D21/00 ; F01D21/20 ; C01G9/00 ; B24B37/005 ; B24B37/013 ; B24B49/12 ; G01B11/06 ; H01L45/00

Abstract:
In polishing a substrate having a layer of GST disposed over an underlying layer, during polishing, a non-polarized light beam is directed onto the layer of GST. The non-polarized light beam reflects from the first substrate to generate a reflected light beam having an infra-red component. A sequence of measurements of intensity of the infra-red component of the reflected light beam are generated, and, in a processor, a time at which the sequence of measurements exhibits a predefined feature is determined.
Public/Granted literature
- US20100185314A1 GST Film Thickness Monitoring Public/Granted day:2010-07-22
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