发明授权
- 专利标题: Imprint apparatus and article manufacturing method
- 专利标题(中): 印刷装置及制品制造方法
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申请号: US13413913申请日: 2012-03-07
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公开(公告)号: US08992206B2公开(公告)日: 2015-03-31
- 发明人: Kohei Wakabayashi
- 申请人: Kohei Wakabayashi
- 申请人地址: JP
- 专利权人: Canon Kabushiki Kaisha
- 当前专利权人: Canon Kabushiki Kaisha
- 当前专利权人地址: JP
- 代理机构: Rossi, Kimms & McDowell LLP
- 优先权: JP2011-049604 20110307
- 主分类号: B29C59/00
- IPC分类号: B29C59/00 ; B29C37/00 ; B29C59/02
摘要:
An imprint apparatus which brings a resin on a substrate into contact with a pattern surface of a mold and cures the resin, includes a substrate holder which holds the substrate, a mold holder which holds the mold with a mold holding surface, a driving mechanism which moves the substrate holder relative to the mold holder, and a controller which controls the driving mechanism such that the substrate holder moves relative to the mold holder while the substrate holder holds a cleaning member instead of the substrate, and the cleaning member is in contact with the mold holding surface, thereby cleaning the mold holding surface.
公开/授权文献
- US20120228789A1 IMPRINT APPARATUS AND ARTICLE MANUFACTURING METHOD 公开/授权日:2012-09-13
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