发明授权
- 专利标题： Deposition apparatus, method of manufacturing organic light emitting display apparatus, and organic light emitting display apparatus
- 专利标题（中）： 沉积装置，制造有机发光显示装置的方法和有机发光显示装置
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申请号： US13951374申请日： 2013-07-25
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公开(公告)号： US08993360B2公开(公告)日： 2015-03-31
- 发明人: Woon-Hyun Choi , Kyung-Han Kim , Myong-Hwan Choi , Kyoung-Won Oh
- 申请人： Samsung Display Co., Ltd.
- 申请人地址： KR Yongin-si
- 专利权人： Samsung Display Co., Ltd.
- 当前专利权人： Samsung Display Co., Ltd.
- 当前专利权人地址： KR Yongin-si
- 代理机构： Christie, Park & Hale, LLP
- 优先权： KR10-2013-0034691 20130329
- 主分类号： H01L21/00
- IPC分类号： H01L21/00 ; H01L51/56 ; H01L51/52
摘要：
A deposition apparatus for depositing a deposition material on a substrate in order to improve characteristics of a deposition layer includes: a deposition source facing the substrate and ejecting the deposition material; a patterning slit sheet including patterning slits for depositing the deposition material in a desired pattern and disposed to face the substrate; a frame coupled to the patterning slit sheet; and a stage bonded to the frame to support the frame, wherein a separation area is formed between the frame and the stage.
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