Invention Grant
- Patent Title: Deposition apparatus, method of manufacturing organic light emitting display apparatus, and organic light emitting display apparatus
- Patent Title (中): 沉积装置，制造有机发光显示装置的方法和有机发光显示装置
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Application No.: US13951374Application Date: 2013-07-25
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Publication No.: US08993360B2Publication Date: 2015-03-31
- Inventor: Woon-Hyun Choi , Kyung-Han Kim , Myong-Hwan Choi , Kyoung-Won Oh
- Applicant: Samsung Display Co., Ltd.
- Applicant Address: KR Yongin-si
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR Yongin-si
- Agency: Christie, Park & Hale, LLP
- Priority: KR10-2013-0034691 20130329
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L51/56 ; H01L51/52
Abstract:
A deposition apparatus for depositing a deposition material on a substrate in order to improve characteristics of a deposition layer includes: a deposition source facing the substrate and ejecting the deposition material; a patterning slit sheet including patterning slits for depositing the deposition material in a desired pattern and disposed to face the substrate; a frame coupled to the patterning slit sheet; and a stage bonded to the frame to support the frame, wherein a separation area is formed between the frame and the stage.
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