Invention Grant
US08994148B2 Device bond pads over process control monitor structures in a semiconductor die 有权
器件接合焊盘超过过程控制监视半导体管芯中的结构

Device bond pads over process control monitor structures in a semiconductor die
Abstract:
A semiconductor die includes a semiconductor substrate having an edge region surrounding an active region, the active region containing devices of an integrated circuit. The semiconductor die further includes interconnect wiring over the active region in an interlayer dielectric and electrically connected to the devices in the active region, and ancillary wiring over the edge region in the interlayer dielectric and isolated from the interconnect wiring and the devices in the active device region. The interlayer dielectric is passivated, and bond pads are provided over the interconnect wiring and electrically connected to the interconnect wiring through openings in the passivation over the active region. Additional bond pads are provided over the ancillary wiring and are electrically connected to the interconnect wiring through additional openings in the passivation over the active region.
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