Invention Grant
US08999498B2 Methods and systems for releasably attaching support members to microfeature workpieces
有权
用于将支撑构件可释放地附接到微特征工件的方法和系统
- Patent Title: Methods and systems for releasably attaching support members to microfeature workpieces
- Patent Title (中): 用于将支撑构件可释放地附接到微特征工件的方法和系统
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Application No.: US13751671Application Date: 2013-01-28
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Publication No.: US08999498B2Publication Date: 2015-04-07
- Inventor: David Pratt , David R. Hembree
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Perkins Coie LLP
- Main IPC: B32B3/10
- IPC: B32B3/10 ; B32B3/22 ; B32B3/30 ; B32B7/02 ; B32B7/12 ; B32B7/14 ; B32B37/14 ; H05K13/00 ; B23B7/02 ; H01L21/78 ; B32B37/12

Abstract:
Methods and apparatuses for releasably attaching support members to microfeature workpieces to support members are disclosed herein. In one embodiment, for example, a method for processing a microfeature workpiece including a plurality of microelectronic dies comprises forming discrete blocks of material at a first side of a support member. The blocks are arranged on the support member in a predetermined pattern. The method also includes depositing an adhesive material into gaps between the individual blocks of material and placing a first side of the workpiece in contact with the adhesive material and/or the blocks. The method further includes cutting through a second side of the workpiece to singulate the dies and to expose at least a portion of the adhesive material in the gaps. The method then includes removing at least approximately all the adhesive material from the support member and/or the workpiece with a solvent.
Public/Granted literature
- US20130136898A1 METHODS AND SYSTEMS FOR RELEASABLY ATTACHING SUPPORT MEMBERS TO MICROFEATURE WORKPIECES Public/Granted day:2013-05-30
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