发明授权
- 专利标题： Cyclic amino compounds for low-k silylation
- 专利标题（中）： 用于低k甲硅烷基化的环状氨基化合物
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申请号： US12721362申请日： 2010-03-10
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公开(公告)号： US08999734B2公开(公告)日： 2015-04-07
- 发明人: James J. F. McAndrew , Curtis Anderson , Christian Dussarrat
- 申请人： James J. F. McAndrew , Curtis Anderson , Christian Dussarrat
- 申请人地址： US CA Fremont
- 专利权人： American Air Liquide, Inc.
- 当前专利权人： American Air Liquide, Inc.
- 当前专利权人地址： US CA Fremont
- 代理商 Patricia E. McQueeney; Allen E. White
- 主分类号： H01L21/00
- IPC分类号： H01L21/00 ; C07F7/10 ; H01L21/02
摘要：
Disclosed herein are mono-functional silylating compounds that may exhibit enhanced silylating capabilities. Also disclosed are method of synthesizing and using these compounds. Finally methods to determine effective silylation are also disclosed.
公开/授权文献
- US20100233829A1 CYCLIC AMINO COMPOUNDS FOR LOW-K SILYLATION 公开/授权日：2010-09-16
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