Invention Grant
- Patent Title: Ionizing radiation blocking in IC chip to reduce soft errors
- Patent Title (中): IC芯片中的电离辐射阻断减少软错误
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Application No.: US11836819Application Date: 2007-08-10
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Publication No.: US08999764B2Publication Date: 2015-04-07
- Inventor: Mukta G. Farooq , Ian D. Melville , Kevin S. Petrarca , Kenneth P. Rodbell
- Applicant: Mukta G. Farooq , Ian D. Melville , Kevin S. Petrarca , Kenneth P. Rodbell
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Hoffman Warnick LLC
- Agent Katherine S. Brown
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L23/532 ; H01L23/556

Abstract:
Methods of blocking ionizing radiation to reduce soft errors and resulting IC chips are disclosed. One embodiment includes forming a front end of line (FEOL) for an integrated circuit (IC) chip; and forming at least one back end of line (BEOL) dielectric layer including ionizing radiation blocking material therein. Another embodiment includes forming a front end of line (FEOL) for an integrated circuit (IC) chip; and forming an ionizing radiation blocking layer positioned in a back end of line (BEOL) of the IC chip. The ionizing radiation blocking material or layer absorbs ionizing radiation and reduces soft errors within the IC chip.
Public/Granted literature
- US20090039515A1 IONIZING RADIATION BLOCKING IN IC CHIP TO REDUCE SOFT ERRORS Public/Granted day:2009-02-12
Information query
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