发明授权
US09000437B2 Thin-film semiconductor device including a multi-layer channel layer, and method of manufacturing the same 有权
包括多层沟道层的薄膜半导体器件及其制造方法

Thin-film semiconductor device including a multi-layer channel layer, and method of manufacturing the same
摘要:
A thin-film semiconductor device according to the present disclosure includes: a substrate; a gate electrode formed above the substrate; a gate insulating film formed on the gate electrode; a channel layer that is formed of a polycrystalline semiconductor layer on the gate insulating film; an amorphous semiconductor layer formed on the channel layer and having a projecting shape in a surface; and a source electrode and a drain electrode that are formed above the amorphous semiconductor layer, and a first portion included in the amorphous semiconductor layer and located closer to the channel layer has a resistivity lower than a resistivity of a second portion included in the amorphous semiconductor layer and located closer to the source and drain electrodes.
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