发明授权
- 专利标题: Thin-film semiconductor device including a multi-layer channel layer, and method of manufacturing the same
- 专利标题(中): 包括多层沟道层的薄膜半导体器件及其制造方法
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申请号: US13425879申请日: 2012-03-21
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公开(公告)号: US09000437B2公开(公告)日: 2015-04-07
- 发明人: Hiroshi Hayashi , Takahiro Kawashima , Genshirou Kawachi
- 申请人: Hiroshi Hayashi , Takahiro Kawashima , Genshirou Kawachi
- 申请人地址: JP Osaka JP Hyogo
- 专利权人: Panasonic Corporation,Panasonic Liquid Crystal Display Co., Ltd.
- 当前专利权人: Panasonic Corporation,Panasonic Liquid Crystal Display Co., Ltd.
- 当前专利权人地址: JP Osaka JP Hyogo
- 代理机构: Greenblum & Bernstein, P.L.C.
- 主分类号: H01L29/04
- IPC分类号: H01L29/04 ; H01L29/66 ; H01L29/786
摘要:
A thin-film semiconductor device according to the present disclosure includes: a substrate; a gate electrode formed above the substrate; a gate insulating film formed on the gate electrode; a channel layer that is formed of a polycrystalline semiconductor layer on the gate insulating film; an amorphous semiconductor layer formed on the channel layer and having a projecting shape in a surface; and a source electrode and a drain electrode that are formed above the amorphous semiconductor layer, and a first portion included in the amorphous semiconductor layer and located closer to the channel layer has a resistivity lower than a resistivity of a second portion included in the amorphous semiconductor layer and located closer to the source and drain electrodes.
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